Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

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This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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Autors Seongbo Shim, Youngsoo Shin
ISBN13 9783030094553
ISBN10 3030094553
Pàgines 138
Any Edició 2019
Fecha de publicación 08/02/2019
Idioma Alemany, Francès

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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography (Alemany, Francès)

Name: Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Price: 117.00 EUR
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ISBN: 9783030094553