Cover -- Half Title -- Title Page -- Copyright Page -- Dedication -- Table of Contents -- Preface -- Editors -- Contributors -- Chapter 1: Introduction -- Chapter 2: Illuminators for Microlithography -- Chapter 3: Laser Beam Shaping in Array-Type Laser Printing Systems -- Chapter 4: Practical UV Excimer Laser Image System Illuminators -- Chapter 5: Micro-Optics for Illumination Light Shaping in Photolithography -- Chapter 6: Beam Shaping for Optical Data Storage -- Chapter 7: Laser Isotope Separation with Shaped Light -- Chapter 8: Applications of Diffractive Optics Elements in Optical Trapping -- Chapter 9: Laser Beam Shaping through Fiber Optic Beam Delivery -- Chapter 10: Laser Beam Shaping by Means of Flexible Mirrors -- Chapter 11: Application of Laser Beam Shaping for Spectral Control of "Spatially Dispersive" Lasers -- Chapter 12: Beam Shaping: A Review -- Index