Detalls del llibre
This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. It details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.
Llegir més - Autor/a SPIE Press
- ISBN13 9780819462077
- ISBN10 0819462071
- Pàgines 122
- Any Edició 2026
- Fecha de publicación 03/05/2026
- Idioma Alemany, Francès
Ressenyes i valoracions
Field Guide to Optical Lithography (Alemany, Francès)
- De
- SPIE Press
- 9780819462077



