Along with numerous opportunities, emerging mm-wave/THz applications face new challenges and require new devices and topologies. This reference provides alternative and novel solutions by CMOS on-chip metamaterials. Unlike conventional metamaterial devices on PCB, the presented CMOS on-chip metamaterial can be deployed in many mm-wave and THz circuit and systems. It provides detailed information from device to system, along with adequate real circuit examples and demonstrations. The authors bring together their expertise and experience on CMOS on-chip metamaterial to provide latest research progress for this emerging topic.